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COMPANY
PRODUCTS

company's product

RIE / ICP/ IBE刻蚀机系列

RIE/ICP/IBE Etching Machine Series

扫描机系列

Scanner series

挑选机系列

Selection machine series

ICP-RIE 3500M3

- Support up to 8-inch wafers High-density reactive ion/ICP options
-Support the completion of high-precision special processes
-Targeting large-scale continuous production, high cost performance
-Support Gideon SiC TRENCH system

SiC/GaN/Si 特色沟槽刻蚀工艺平台

超声波扫描显微镜

LXY-SAM01 超声波扫描显微镜是安全无损检测工具，借高频超声波信号穿透产品内部，经回波信号处理生成内部图像，能检测空洞、分层等缺陷，广泛用于新能源、半导体等行业。

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LED芯片分选机

 

本设备以回转 PPX 马达带动两取 / 固晶臂，在顶针顶出系统辅助下，用固晶臂吸嘴取 WAFER 蓝膜上垂直摆放的 LED 晶粒，送至 BIN 盘蓝膜重排。

ICP-RIE 3500M1

- Support up to 8-inch wafers High-density reactive ion/ICP options
-Support the completion of high-precision special processes
- Positioning agile manufacturing, small batch production of customized specialty chips
-Support Gideon SiC TRENCH system

Agile Manufacturing

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ALD Infinity C200P

 

针对 MicroLED, 太阳能电池，量子点，OLED表面纯化及隔水封装 及碳化硅的栅极氧化层。

First generation R&D platform

Support RIE / ICP options

​-Support RIE and ICP selection, and continue to enrich R&D tools
-Select high-quality components, high cost performance
- Pursue seamless transition from R&D to mass production

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IBE离子束刻蚀设备

IBE离子束刻蚀是一种利用高能离子束对样品表面进行物理溅射去除材料，从而实现精细刻蚀结构制造的技术。

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